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Energy and angular spectra of electrons emitted from foils by ion beams

✍ Scribed by N. Oda; F. Nishimura; Y. Yamazaki; S. Tsurubuchi

Publisher
Elsevier Science
Year
1980
Weight
309 KB
Volume
170
Category
Article
ISSN
0029-554X

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Oxygen ions with energy in the range 4-15 keV O' were used to synthesize surface oxide layers by bombarding Si samples at di †erent angles of incidence with respect to the surface normal. High-resolution Rutherford backscattering spectroscopy and channelling were used to determine both the stoichiom