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Energetic particle fluxes in magnetron sputter deposition of a-Si:H

✍ Scribed by Alan M. Myers; James R. Doyle; G. Jeff Feng; Nagi Maley; David L. Ruzic; John R. Abelson

Book ID
117147111
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
349 KB
Volume
137-138
Category
Article
ISSN
0022-3093

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## Abstract In this study, the deposition temperature effects on the properties of hydrogenated amorphous silicon films are reported. The a‐Si:H thin films were deposited by DC magnetron sputtering technique, according to a new protocol of deposition. This last consists of a successively several th