✦ LIBER ✦
Energetic ion scattering analysis and glow discharge optical spectrometry characterization of amorphous hydrogenated carbon films elaborated by PACVD
✍ Scribed by T Petit; A Chevarier; N Chevarier; L Deshayes; M Charbonnier; M Romand
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 566 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0042-207X
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