Design of GaN convex diffractive microle
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Chii-Chang Chen; Jenq-Yang Chang; Gou-Chung Chi
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Article
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2002
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Elsevier Science
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English
β 226 KB
In this work, convex di ractive microlenses are designed for fabrication in GaN-based material with a gray-level mask. The aspect ratios of the surface relief of plano-convex and double-convex microlenses for di erent numerical apertures are compared to reduce the fabrication di culty. The results s