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Emission line intensities in an r.f. sputtering glow discharge system

✍ Scribed by J.L. Hernández-Rojas; M.L. Lucía; J. Santamaría; G. Gonzáles-Díaz; I. Mártil; F. Sánchez-Quesada

Book ID
107864285
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
321 KB
Volume
228
Category
Article
ISSN
0040-6090

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A new method of sputtered depth determination was evaluated for glow discharge (GD) analysis of solid samples. Although sputter analysis methods like GD may characterize samples in terms of both composition and spatial (depth) distribution of those components, quantitative analysis may suffer signif