✦ LIBER ✦
Embedded benzocyclobutene in silicon: An integrated fabrication process for electrical and thermal isolation in MEMS
✍ Scribed by Alireza Modafe; Nima Ghalichechian; Michael Powers; Michael Khbeis; Reza Ghodssi
- Book ID
- 108207494
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 773 KB
- Volume
- 82
- Category
- Article
- ISSN
- 0167-9317
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