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Ellipsometry of magnetron sputtered thin films of Ni, Si, AlN and Ni based multilayers

✍ Scribed by Petr Široký; Jaroslav Sobota; Lubomír Jastrabík


Book ID
113317460
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
669 KB
Volume
113
Category
Article
ISSN
0304-8853

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