Ellipsometrical characterization of complex refractive index depth profile of 50 keV silicon ion implanted PMMA

✍ Scribed by Russev, Stoyan C.; Tsutsumanova, Gichka G.; Stefanov, Ivan L.; Hadjichristov, Georgi B.

• Book ID: 120274206
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 828 KB
• Volume: 94
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/j.vacuum.2013.01.014