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Ellipsometric investigation of thick polymer films

✍ Scribed by K. Forcht; A. Gombert; R. Joerger; M. Köhl

Book ID
114086420
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
245 KB
Volume
313-314
Category
Article
ISSN
0040-6090

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The galvanostatic oxidation of hafnium in different electrolytes was investigated by means of i/l-G/l, ellipsometry in the range O-150 V corresponding to oxides thicknesses in the range O-350 nm. The oxide surfaces were characterized by scanning electron microscopy (SEM) examination. Single and doub