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Ellipsometric Investigation of the Kinetics of Native Oxide Growth on Aluminium and Argon Implanted GaAs

✍ Scribed by Kulik, M. ;Żuk, J.

Publisher: John Wiley and Sons
Year: 1989
Tongue: English
Weight: 227 KB
Volume: 112
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2211120245

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