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Ellipsometric analysis of inhomogeneous structures on the basis of complex reflection coefficients

โœ Scribed by R.I. Lubinskaya; A.S. Mardezhov; K.K. Svitashov; V.A. Shvets


Publisher
Elsevier Science
Year
1986
Weight
27 KB
Volume
177
Category
Article
ISSN
0167-2584

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