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Elimination of SiC/SiO2 interface states by preoxidation ultraviolet-ozone cleaning
✍ Scribed by Afanas’ev, V. V.; Stesmans, A.; Bassler, M.; Pensl, G.; Schulz, M. J.; Harris, C. I.
- Book ID
- 120939636
- Publisher
- American Institute of Physics
- Year
- 1996
- Tongue
- English
- Weight
- 277 KB
- Volume
- 68
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.115611
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