Elimination of organic contaminants from silicon wafers using high concentration ozonated-water

✍ Scribed by Kenichi Uemura; Teruo Haibara; Takio Adachi

• Book ID: 108119033
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 254 KB
• Volume: 53
• Category: Article
• ISSN: 0013-4686
• DOI: 10.1016/j.electacta.2007.04.059