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Elimination of GeO2 and Ge3N4 interfacial transition regions and defects at n-type Ge interfaces: A pathway for formation of n-MOS devices on Ge substrates

✍ Scribed by G. Lucovsky; S. Lee; J.P. Long; H. Seo; J. Lüning


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
814 KB
Volume
254
Category
Article
ISSN
0169-4332

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