✦ LIBER ✦
Elimination of effects due to patterning imperfections in electrical test structures for submicrometer feature metrology
✍ Scribed by R.A. Allen; M.W. Cresswell
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 639 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0038-1101
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