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Elemental composition analysis of silicon carbonitride thin films by energy dispersive spectroscopy

✍ Scribed by Yu. M. Rumyantsev; N. I. Fainer; E. A. Maximovskii; B. M. Ayupov

Book ID
106428108
Publisher
SP MAIK Nauka/Interperiodica
Year
2010
Tongue
English
Weight
346 KB
Volume
51
Category
Article
ISSN
0022-4766

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