✦ LIBER ✦
Electrostatically excited and capacitively detected flexural plate waves on thin silicon nitride membranes with chemical sensor applications
✍ Scribed by T. Giesler; J.-U. Meyer
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 337 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0925-4005
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