Electrostatically actuated resonant microcantilever beam in CMOS technology for the detection of chemical weapons

✍ Scribed by Voiculescu, I.; Zaghloul, M.E.; McGill, R.A.; Houser, E.J.; Fedder, G.K.

• Book ID: 120342378
• Publisher: IEEE
• Year: 2005
• Tongue: English
• Weight: 1001 KB
• Volume: 5
• Category: Article
• ISSN: 1530-437X
• DOI: 10.1109/JSEN.2005.851016