✦ LIBER ✦
Electropolishing as a method for deburring high aspect ratio nickel RF MEMS
✍ Scribed by Stephanie Kissling; Klaus Bade; Martin Börner; David M. Klymyshyn
- Book ID
- 106185937
- Publisher
- Springer-Verlag
- Year
- 2010
- Tongue
- English
- Weight
- 569 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0946-7076
No coin nor oath required. For personal study only.