Photoemission sampling technique for hig
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H. Beha; H. Seitz; A. Blacha; R. Clauberg
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Article
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1987
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Elsevier Science
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English
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After a short review of the basic principles of time-resolved photoemission and its capabilities as a method for contactless electrical testing of integrated circuits, this paper reports on the progress made toward meeting the requirements for integrated-circuit (IC) testing and diagnostic equipment