Electronic properties of silicon nanoneedle structure obtained by RIE for nonvolatile memory applications

✍ Scribed by Sungwook Jung; Jinsu Yoo; Yungkuk Kim; Kyunghae Kim; S.K. Dhungel; J. Yi

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 312 KB
• Volume: 26
• Category: Article
• ISSN: 0928-4931
• DOI: 10.1016/j.msec.2005.09.088