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Electron transport simulation for the ion-electron emission problem

✍ Scribed by AP Palov; VV Pletnev; VG Tel'kovsky

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
169 KB
Volume
44
Category
Article
ISSN
0042-207X

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At the INFN Legnaro Laboratories (Padova, Italy), an ion electron emission microscope dedicated to the study of radiation-induced damage in microelectronic devices has been recently installed. It is used to recognize, with micrometric resolution, the impact point of every single ion into the target.