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Electron-stimulated nitridation of Si(100) in pure ammonia

✍ Scribed by O.L. Tarasova; V.G. Kotlyar; A.A. Saranin; E.A. Khramtsova; V.G. Lifshits

Book ID: 118367124
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 531 KB
Volume: 310
Category: Article
ISSN: 0039-6028
DOI: 10.1016/0039-6028(94)91385-4

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