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Electron-stimulated desorption of hydrogen from H/Si(001)-1×1 surface studied by time-of-flight elastic recoil detection analysis

✍ Scribed by Takashi Fuse; Toshiaki Fujino; Jeong-Tak Ryu; Mitsuhiro Katayama; Kenjiro Oura


Book ID
117219045
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
132 KB
Volume
420
Category
Article
ISSN
0039-6028

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Large erosion ($1.1 Â 10 4 atoms/ion) of H from hydrogenated MCT wafers is observed due to the bombardment with 80 MeV Ni 9+ ions. The initial H areal concentration and hydrogen depletion rate is monitored by elastic recoil detection analysis. The ion-damaged zones from where depletion of H takes pl