Electron spin resonance study of metal-nitride-silicon structures: Observation of Si dangling bonds with different configurations and trapping properties in silicon nitride

✍ Scribed by D. Jousse; J. Kanicki; J.H. Stathis

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 333 KB
• Volume: 39
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(89)90458-3