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Electron spectrum of arsenic inclusions in gallium arsenide

✍ Scribed by A. A. Sofronov; S. G. Kataev; V. A. Chaldyshev


Book ID
110673603
Publisher
Springer
Year
1998
Tongue
English
Weight
250 KB
Volume
41
Category
Article
ISSN
1573-9228

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Coulometric determination of arsenic in
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The determination of small variations in the stoichiometry of undoped, semi-insulating gallium arsenide can be achieved by using constant current coulometly. Samples taken from a wafer are etched in HF, dissolved in NaOH-peroxide solution, then treated with a citric acid buffer. To convert the arsen