✦ LIBER ✦
Electron probe X-ray microanalysis as a non-destructive method for the quantitative determination of ion-implanted impurities in silicon
✍ Scribed by A. P. Alexeyev; V. I. Zaporozchenko
- Book ID
- 112291264
- Publisher
- Springer
- Year
- 1991
- Tongue
- English
- Weight
- 435 KB
- Volume
- 341
- Category
- Article
- ISSN
- 1618-2650
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