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Electron paramagnetic resonance study of hydrogen-incorporated ultrananocrystalline diamond thin films

✍ Scribed by Liu, Chao; Xiao, Xingcheng; Wang, Hsien-Hau; Auciello, Orlando; Carlisle, John A.

Book ID
120183493
Publisher
American Institute of Physics
Year
2007
Tongue
English
Weight
479 KB
Volume
101
Category
Article
ISSN
0021-8979

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## Abstract The structural, optical, and electronic properties of nanocrystalline diamond thin films grown from a hydrogen‐rich CH~4~/H~2~ gas phase via hot filament (HF) CVD and of ultrananocrystalline diamond thin films grown from an argon‐rich sp^2^ gas phase via microwave plasma enhanced (MPE)