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Electron optical design of an e-beam comb probe printer

✍ Scribed by P. Schäffer; H. Schäfer; R. Heydel; K.-H. Herrmann; J. Droemer; V. Drexel


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
396 KB
Volume
9
Category
Article
ISSN
0167-9317

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