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Electron optical design of a high‐resolution low‐voltage scanning electron microscope with field emission gun

✍ Scribed by Ximen, Jiye; Lin, P. S. D.; Pawley, J. B.; Schippert, M.


Book ID
111885269
Publisher
American Institute of Physics
Year
1993
Tongue
English
Weight
1003 KB
Volume
64
Category
Article
ISSN
0034-6748

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