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Electron-microscopical investigation of structural changes in n-type silicon after boron ion implantation: T P Timasheva et al, Proc of 9th All-Union Conf on Electron Microscopy, Tbilisi 1973, 246–247 (in Russian)


Publisher
Elsevier Science
Year
1975
Tongue
English
Weight
162 KB
Volume
25
Category
Article
ISSN
0042-207X

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