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Electron light scattering from doped silicon

✍ Scribed by I.P. Ipatova; A.V. Subashiev; V.A. Voitenko


Publisher
Elsevier Science
Year
1981
Tongue
English
Weight
241 KB
Volume
37
Category
Article
ISSN
0038-1098

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## Abstract Porous silicon films and multilayers were studied using Brillouin spectroscopy. Acoustic wave velocities and elastic constants were determined for films with porosity ∼0.60 formed from p^–^, p^+^ and n^+^ crystalline silicon. The velocities and elastic constants depend on the pore/cryst