Electron-induced interaction of selected hydrocarbons with TiO2 surfaces: the relevance to extreme ultraviolet lithography

✍ Scribed by Yakshinskiy, B V; Zalkind, S; Bartynski, R A; Caudillo, R

• Book ID: 111916121
• Publisher: Institute of Physics
• Year: 2010
• Tongue: English
• Weight: 820 KB
• Volume: 22
• Category: Article
• ISSN: 0953-8984
• DOI: 10.1088/0953-8984/22/8/084004