✦ LIBER ✦
Electron holographic characterization of nanoscale charge distributions for ultra shallow PN junctions in Si
✍ Scribed by P.S. Chakraborty; M.R. McCartney; J. Li; C. Gopalan; U. Singisetti; S.M. Goodnick; T.J. Thornton; M.N. Kozicki
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 234 KB
- Volume
- 19
- Category
- Article
- ISSN
- 1386-9477
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