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Electron heating in low-pressure rf glow discharges

โœ Scribed by M. Surendra; D. B. Graves; I. J. Morey


Book ID
126681373
Publisher
American Institute of Physics
Year
1990
Tongue
English
Weight
663 KB
Volume
56
Category
Article
ISSN
0003-6951

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Power dissipation in rf glow discharges
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