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Electron energy spectrum accompanying the passage of fission fragments through thin Al2O3films

✍ Scribed by V. A. Rykov; P. P. D'yachenko; A. A. Koshelev

Book ID
105081759
Publisher
Springer US
Year
1987
Tongue
English
Weight
591 KB
Volume
63
Category
Article
ISSN
1573-8205

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The formation mechanism of a high density of nanovoids by annealing amorphous Al 2 O 3 thin films prepared by an electron beam deposition method was investigated. Transmission electron microscopy observations revealed that nanovoids $1-2 nm in size were formed by annealing amorphous Al 2 O 3 thin fi