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Electron energy distributions in e‐beam generated Xe and Ar plasmas

✍ Scribed by Elliott, C. J.; Greene, A. E.

Book ID
111863603
Publisher
American Institute of Physics
Year
1976
Tongue
English
Weight
704 KB
Volume
47
Category
Article
ISSN
0021-8979

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## Abstract The use of electron beam‐generated plasmas produced in Ar/SF~6~ mixtures to modify the surface of ultra‐high molecular weight polyethylene substrates is discussed. Changes in the surface energy, chemistry, and morphology are presented as a function of plasma operating parameters, along