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Electron density measurements in a slot antenna microwave plasma source by means of the plasma oscillation method

✍ Scribed by Schwabedissen, A; Soll, C; Brockhaus, A; Engemann, J

Book ID: 121301659
Publisher: Institute of Physics
Year: 1999
Tongue: English
Weight: 185 KB
Volume: 8
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/8/3/314

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