✦ LIBER ✦
Electron cyclotron resonance plasma ion beam effects on the formation of SiC on Si(001) characterized by in-situ photoemission
✍ Scribed by M. Diani; D. Aubel; J.L. Bischoff; L. Kubler; D. Bolmont
- Book ID
- 107864530
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 470 KB
- Volume
- 241
- Category
- Article
- ISSN
- 0040-6090
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