✦ LIBER ✦

Electron beam testing in Japan

✍ Scribed by Hiromu Fujioka; Katsumi Ura

Book ID: 104306154
Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 364 KB
Volume: 7
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(87)80004-7

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✦ Synopsis

This paper summarizes some recent topics of electron beam testing in Japan: voltage contrast techniques, EB tester systems, measurement of microstructures, and automatic control of the electron optical column.

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