Electron beam technology in microelectronic fabrication: Edited by George R Brewer, Academic Press, London, 1980. 362 pp. £20.60 (UK), $36.50 (USA)

✍ Scribed by RA Lawes

• Book ID: 103465891
• Publisher: Elsevier Science
• Year: 1982
• Tongue: English
• Weight: 115 KB
• Volume: 32
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(82)93821-0