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Electron-Beam Sensitivity and Patterning of an Aqueous-Develop, Epoxy-Based Polynorbornene Dielectric Material

✍ Scribed by Mehrsa Raeis-Zadeh, Paul A. Kohl


Book ID
113087316
Publisher
Springer US
Year
2012
Tongue
English
Weight
387 KB
Volume
41
Category
Article
ISSN
0361-5235

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