✦ LIBER ✦
Electron-beam proximity printing—a new high-speed lithography method for submicron structures : H. Bohlen, J. Greschner, J. Keyser, W. Kulcke and P. Nehmiz. IBM Jl Res. Dev.26 (5), 568 (1982)
- Book ID
- 107829662
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 73 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0026-2714
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