Site-selective growth of self-assembled
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M. Mehta; D. Reuter; A. Melnikov; A.D. Wieck; A. Remhof
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Article
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2008
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Elsevier Science
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English
⚖ 373 KB
A site-selective growth of self-organized InAs quantum dots (QDs) employing a combination of in-situ focused ion beam (FIB) implantation and self-organized molecular beam epitaxy (MBE) growth has been successfully demonstrated. First, a buffer layer of GaAs was grown by MBE before a square lattice o