✦ LIBER ✦
Electron-beam microfabrication equipment for microcircuit research and production : W. R. Livesay. Solid St. Techn. 37 (June 1974)
- Book ID
- 103272377
- Publisher
- Elsevier Science
- Year
- 1975
- Tongue
- English
- Weight
- 56 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0026-2714
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