✦ LIBER ✦
Electron-beam-induced potentials in semiconductors: calculation and measurement with an SEM/SPM hybrid system
✍ Scribed by Thomas, Ch; Joachimsthaler, I; Heiderhoff, R; Balk, L J
- Book ID
- 115545975
- Publisher
- Institute of Physics
- Year
- 2004
- Tongue
- English
- Weight
- 582 KB
- Volume
- 37
- Category
- Article
- ISSN
- 0022-3727
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