Electron beam induced deposition at elevated temperatures: compositional changes and purity improvement

✍ Scribed by Mulders, J J L; Belova, L M; Riazanova, A

• Book ID: 118742512
• Publisher: Institute of Physics
• Year: 2010
• Tongue: English
• Weight: 592 KB
• Volume: 22
• Category: Article
• ISSN: 0957-4484
• DOI: 10.1088/0957-4484/22/5/055302