Electron-beam-induced current imaging for the characterisation of structural defects in Si1−xGex films grown by LE-PECVD

✍ Scribed by A. Virtuani; S. Marchionna; M. Acciarri; G. Isella; H. von Kaenel

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 383 KB
• Volume: 9
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2006.08.064