✦ LIBER ✦
Electron-beam-induced current decay measurements in electron probe instruments using a multichannel analyzer
✍ Scribed by Yacobi, B. G. ;Herrington, C. R.
- Publisher
- Wiley (John Wiley & Sons)
- Year
- 1985
- Tongue
- English
- Weight
- 228 KB
- Volume
- 2
- Category
- Article
- ISSN
- 0741-0581
No coin nor oath required. For personal study only.
✦ Synopsis
A simple method for decay measurements of the charge collection mode (commonly referred to as electron-beam-induced current or EBIC) of an electron probe instrument is presented. The decay, which occurs at continuous electron irradiation, should be distinguished from a decay measurement due to the electron beam blanking. This method could be applied to other modes of an electron probe instrument, e.g., cathodoluminescence, in studying electron-beam-sensitive semiconductors. An example of the decay of the EBIC signal in a hydrogenated amorphous silicon device is presented.