✦ LIBER ✦
Electron beam direct writing technology applied to 512 Kbit ROM with 1 μm geometry : Katumi Suzuki, Mitsutaka Morimoto, Nobuhiro Endo, Masunori Sugimoto, Yasuo Iida, Yukinori Kurogi and Katsumi Mori. IEEE Trans. Electron DevicesED-28 (9), 1088 (1981)
- Book ID
- 107829699
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 134 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0026-2714
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